In-situ ellipsometric study of the phenomenon of photodoping of Ag metal into a-As2S3 film

Shuichi Kawabata; Yuka Miyanishi; Tsumoto Ogawa; Moriaki Wakaki

doi:10.1117/12.246239

16 August 1996 In-situ ellipsometric study of the phenomenon of photodoping of Ag metal As₂S₃ film

Shuichi Kawabata, Yuka Miyanishi, Tsumoto Ogawa, Moriaki Wakaki

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246239
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

The process of photo-stimulated dissolution of Ag atom/ion into amorphous chalcogenide materials As₂S₃ was observed in-situ by ellipsometry. The sample was Ag/As₂S₃ film system which was deposited onto the glass substrate. The photodoping was proceeded by the irradiation of the light of 546:1 nm. Obtained values of ellipsometric parameters (Psi) and (Delta) were fitted by using a multilayer model. Time dependent changes of each thickness of Ag, Ag:As₂S₃ and As₂S₃ layers during the diffusion process were derived. These behaviors will be explained in relation with photodoping mechanism.

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Shuichi Kawabata, Yuka Miyanishi, Tsumoto Ogawa, and Moriaki Wakaki "In-situ ellipsometric study of the phenomenon of photodoping of Ag metal As₂S₃ film", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246239

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