In-situ ultrahigh vacuum spectroscopic ellipsometry

Tomoyuki Fukazawa; Kazuki Ishihara; Yoichi Hoshi; Shuichi Kawabata

doi:10.1117/12.246213

16 August 1996 In-situ ultrahigh vacuum spectroscopic ellipsometry

Tomoyuki Fukazawa, Kazuki Ishihara, Yoichi Hoshi, Shuichi Kawabata

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246213
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

Polarization modulated spectroellipsometer was utilized to monitor, in-situ, deposition of Ag on Si substrate. The angle of incidence was determined using a Si substrate covered with native oxide. In the wavelength region of 550 nm to 700 nm, the ambiguity of the angle of incidence was within 0.2 deg. A plasma resonance peak manifested in reflectance spectrum around 350 nm increased and shifted to shorter wavelength as the deposition time increased from 1 sec to 10 sec. (Delta) (Psi) trajectory approached to a simulation curve of a continuous film as the deposition time increased to 40 sec where the film thickness was estimated to be 20 nm.

Citation Download Citation

Tomoyuki Fukazawa, Kazuki Ishihara, Yoichi Hoshi, and Shuichi Kawabata "In-situ ultrahigh vacuum spectroscopic ellipsometry", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246213

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available