Homogeneity measurement using an infrared interferometer

Lei Chen; Jinbang Chen; Shenwang Huang; Guoyou Jin

doi:10.1117/12.253082

3 October 1996 Homogeneity measurement using an infrared interferometer

Lei Chen, Jinbang Chen, Shenwang Huang, Guoyou Jin

Author Affiliations +

Proceedings Volume 2899, Automated Optical Inspection for Industry; (1996) https://doi.org/10.1117/12.253082
Event: Photonics China '96, 1996, Beijing, China

Abstract

An interferometric method is used to evaluate the refractive index deviation in the infrared materials. The deformations of the surfaces on the sample are precisely measured by phase shifting interferometer working at 0.6328 micrometers and the errors introduced by the surface deformations are removed from the results. The accuracy of this method reaches the order of 10^-5.

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Lei Chen, Jinbang Chen, Shenwang Huang, and Guoyou Jin "Homogeneity measurement using an infrared interferometer", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253082

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