Ultraviolet Mirau correlation microscopy

Fang Cheng Chang; Gordon S. Kino

doi:10.1117/12.271277

10 April 1997 Ultraviolet Mirau correlation microscopy

Fang Cheng Chang, Gordon S. Kino

Proceedings Volume 2984, Three-Dimensional Microscopy: Image Acquisition and Processing IV; (1997) https://doi.org/10.1117/12.271277
Event: BiOS '97, Part of Photonics West, 1997, San Jose, CA, United States

Abstract

We report our work towards improving the resolution performance of a conventional Mirau correlation microscope (MCM) by operating in the UV. We have modified the Mirau interferometer with the introduction of new thin-film beamsplitters that are nonattenuative in the ultra-violet, and new interferometer structure that can be made to work with short working distance objectives. Along with special UV optics, the new MCM can be made to operate in the ultra- violet region. By operating at 248 nm mercury line, the expected resolution improvement in both transverse and depth directions should be nearly doubled. A fully working MCM UV system at 325 nm is described in detail, and demonstrates the feasibility for a 248 nm system once a high quality 248 nm objective becomes available.

Citation Download Citation

Fang Cheng Chang and Gordon S. Kino "Ultraviolet Mirau correlation microscopy", Proc. SPIE 2984, Three-Dimensional Microscopy: Image Acquisition and Processing IV, (10 April 1997); https://doi.org/10.1117/12.271277

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