Fabrication of Si/Si1-xGex waveguide WDM components

Dan-Xia Xu; Siegfried Janz; Robin L. Williams; Elizabeth Allegretto; Sylvain Mailhot; Jian Jun He; Jean-Marc Baribeau; Hugues Lafontaine; John Stapledon; Jeffrey W. Fraser; Mike R. Robillard; Paul E. Jessop; Stephen Kovacic

doi:10.1117/12.273852

25 April 1997 Fabrication of Si/Si_1-xGe_x waveguide WDM components

Dan-Xia Xu, Siegfried Janz, Robin L. Williams, Elizabeth Allegretto, Sylvain Mailhot, Jian Jun He, Jean-Marc Baribeau, Hugues Lafontaine, John Stapledon, Jeffrey W. Fraser, Mike R. Robillard, Paul E. Jessop, Stephen Kovacic

Author Affiliations +

Proceedings Volume 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices; (1997) https://doi.org/10.1117/12.273852
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The design of manufacturable Si/Si_1-xGe_x waveguide WDM components involves several unique materials and fabrication issues which must be confronted and resolved. Accurate data for the refractive indices of the waveguide materials are essential. Furthermore, the waveguide design is tightly constrained by the requirement that Si/Si_1-xGe_x layer thickness is within the pseudomorphic growth limit. By combining refractive indices determined from mode profile measurements of MBE and CVD grown waveguides, and epilayer thickness constraints set by the pseudomorphic growth limits, we have determined a set of design criteria for Si/Si_1-xGe_x waveguides for WDM and optical signal routing applications. Optically smooth and vertical Si/Si_1-xGe_x waveguide facets are critical in permitting highly efficient coupling between the fiber and the Si chip. Since Si has an equal probability of cleaving alone either the <110> or <111> planes, producing such high quality facets consistently is extremely challenging. We have demonstrated that high quality facets can be obtained consistently by cleaving, with and without a dielectric layer on Si substrates.

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Dan-Xia Xu, Siegfried Janz, Robin L. Williams, Elizabeth Allegretto, Sylvain Mailhot, Jian Jun He, Jean-Marc Baribeau, Hugues Lafontaine, John Stapledon, Jeffrey W. Fraser, Mike R. Robillard, Paul E. Jessop, and Stephen Kovacic "Fabrication of Si/Si_1-xGe_x waveguide WDM components", Proc. SPIE 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices, (25 April 1997); https://doi.org/10.1117/12.273852

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