Highly accurate CD measurement with a micro standard

Katsuhiro Sasada; Nobuyoshi Hashimoto; Hiroyoshi Mori; Tadashi Ohtaka

doi:10.1117/12.275945

7 July 1997 Highly accurate CD measurement with a micro standard

Katsuhiro Sasada, Nobuyoshi Hashimoto, Hiroyoshi Mori, Tadashi Ohtaka

Proceedings Volume 3050, Metrology, Inspection, and Process Control for Microlithography XI; (1997) https://doi.org/10.1117/12.275945
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

Accurate measurement with CD-SEMs requires the use of a calibrated standard. A new standard, micro-scale was developed using laser interferometer lithography and anisotropic chemical etching on Si-material and was reported previously. In this paper, we report on a method to control measurement accuracy of CD-SEMs using the micro-scale. We have studied various factors for measurement errors and have estimated the 95 percent confidence level. We have carried out 3-pitch measurement of the micro-scale in a fully automated mode and estimated the 95 percent confidence level. Then, we compared two 95 percent confidence levels and concluded that the estimation expected from the measurement errors was reasonable.

Citation Download Citation

Katsuhiro Sasada, Nobuyoshi Hashimoto, Hiroyoshi Mori, and Tadashi Ohtaka "Highly accurate CD measurement with a micro standard", Proc. SPIE 3050, Metrology, Inspection, and Process Control for Microlithography XI, (7 July 1997); https://doi.org/10.1117/12.275945

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available