Laser cleaning of microparticles: theoretical prediction of threshold laser fluence

Yongfeng Lu; Wen Dong Song; Minghui Hong; Daniel S. H. Chan; Tohsiew Low

doi:10.1117/12.628227

18 August 1997 Laser cleaning of microparticles: theoretical prediction of threshold laser fluence

Yongfeng Lu, Wen Dong Song, Minghui Hong, Daniel S. H. Chan, Tohsiew Low

Proceedings Volume 3097, Lasers in Material Processing; (1997) https://doi.org/10.1117/12.628227
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

A theoretical model for laser cleaning of microparticles from solid surface was established by taking adhesion force and cleaning force into account. The threshold fluence can be obtained from this model and verified by the experimental results. It was found that laser irradiation from the reverse side of transparent substrate is more effective to remove particles than that from the front side. Laser irradiation with shorter wavelength can result in higher cleaning efficiency and lower threshold fluence for removal of particles from solid surfaces. Keywords: Laser cleaning, microparticles, Van der Waals force, cleaning force, cleaning threshold

Citation Download Citation

Yongfeng Lu, Wen Dong Song, Minghui Hong, Daniel S. H. Chan, and Tohsiew Low "Laser cleaning of microparticles: theoretical prediction of threshold laser fluence", Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); https://doi.org/10.1117/12.628227

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