Optical constants of materials for multilayer mirror applications in the EUV/soft x-ray region

Regina Soufli; Eric M. Gullikson

doi:10.1117/12.278851

11 July 1997 Optical constants of materials for multilayer mirror applications in the EUV/soft x-ray region

Regina Soufli, Eric M. Gullikson

Proceedings Volume 3113, Grazing Incidence and Multilayer X-Ray Optical Systems; (1997) https://doi.org/10.1117/12.278851
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Sum rule tests demonstrate that there are deficiencies in the available optical data for materials important in multi-layer mirror applications, such as Si and Mo, leading to errors in the estimation of the real and imaginary parts of the refractive index n equals 1 - (delta) + i(beta) ((delta) , (beta) are also known as 'optical constants'). The refractive index of Si is investigated in the region 50 - 180 eV using angle dependent reflectance measurements. It is shown that the reflectance method has limited efficiency in certain energy regions. Transmission measurements for the refractive index of Mo are performed in the energy range 60 - 930 eV. The new experimental results are used in order to form an improved, self-consistent database for the real and the imaginary part of n for Si and Mo and they are compared to the values in the 1993 atomic tables. The normal incidence reflectivities of Mo/Si and Mo/Be multilayer mirrors are calculated using the new results.

Citation Download Citation

Regina Soufli and Eric M. Gullikson "Optical constants of materials for multilayer mirror applications in the EUV/soft x-ray region", Proc. SPIE 3113, Grazing Incidence and Multilayer X-Ray Optical Systems, (11 July 1997); https://doi.org/10.1117/12.278851

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