Geometrical phase measurement with a Michelson interferometer for microsurface characterization

Alexander V. Tavrov; Dmitry V. Ublinsky; Vladimir A. Andreev

doi:10.1117/12.283871

3 October 1997 Geometrical phase measurement with a Michelson interferometer for microsurface characterization

Alexander V. Tavrov, Dmitry V. Ublinsky, Vladimir A. Andreev

Proceedings Volume 3121, Polarization: Measurement, Analysis, and Remote Sensing; (1997) https://doi.org/10.1117/12.283871
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

There have been many recent manifestations of geometrical phases in optics, but in the majority of publications, both theoretical and experimental. These phases are considered only as some interesting natural phenomena. Nevertheless,the information contained in geometrical phase can be used for constructing the devices capable of measurement both geometrical and optical characteristics of a micro-surface, which combine the properties of profilometer and ellipsometer. The practical aspects of the fundamental theory of geometrical phases in the non-planar 3D- interferometer are applied for a micro-surface measurements. The proposed interpretation allows to consider components of the dynamic phase and the geometric phase separately in an interference pattern. This concept provides the following micro-object characterization: refractive index, extinction ration, pixel planar angles, polarization optical constants. In order to identify the geometric phases the ellipsometer techniques are applied and a spatial distribution of the Jone's matrix is calculated. The measurement procedure is developed for the anisotropic objects as well. The role of the geometric phases is rather important when a high magnification mode of the interferometer is adjusted.

Citation Download Citation

Alexander V. Tavrov, Dmitry V. Ublinsky, and Vladimir A. Andreev "Geometrical phase measurement with a Michelson interferometer for microsurface characterization", Proc. SPIE 3121, Polarization: Measurement, Analysis, and Remote Sensing, (3 October 1997); https://doi.org/10.1117/12.283871

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KEYWORDS

Interferometers

Michelson interferometers

Polarization

Geometrical optics

Measurement devices

Phase measurement

Refractive index

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