PROCEEDINGS VOLUME 3223
MICROMACHINING AND MICROFABRICATION | 29-30 SEPTEMBER 1997
Micromachining and Microfabrication Process Technology III
Editor Affiliations +
IN THIS VOLUME

7 Sessions, 36 Papers, 0 Presentations, 0 Posters
MICROMACHINING AND MICROFABRICATION
29-30 September 1997
Austin, TX, United States
Etching Technology
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284466
Carole Craig Barron, Brady R. Davies, Jeffry J. Sniegowski, M. Steven Rodgers, John H. Comtois, M. Adrian Michalicek
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284476
Jean Gobet, Jean-Phillipe Thiebaud, Francois Crevoisier, Jean-Marc Moret
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284487
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284497
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284498
MEMS Technology I
Masayoshi Esashi, Takahito Ono, Kazuyuki Minami
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284499
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284500
Marcelo B. A. Fontes, Jorge J. Santiago-Aviles, Rogerio Furlan
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284501
Norbert Schwesinger, Arne Albrecht
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284467
LIGA and Related Technology
MEMS Materials
Gary R. Trott, Long Yang, Kent W. Carey, Richard P. Ratowsky, Jeffrey S. Kallman
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284472
Matthias Fuertsch, Michael Offenberg, Horst Munzel, Juan Ramon Morante
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284473
Jason W. Weigold, Wen Han Juan, Stella W. Pang, Jeffrey T. Borenstein
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284474
Colin M. A. Ashruf, Patrick J. French, Charles R. de Boer, Pasqualina M. Sarro
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284475
Sam T. Davies, Kazuyoshi Tsuchiya
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284477
MEMS Technology II
Madhav Datta
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284478
Heng Yang, Jianjun Ren, Minhang Bao, Shaoqun Shen
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284479
Hiroshi Ohji, Sami Lahteenmaki, Patrick J. French
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284480
Gregory J. Athas, Kathryn E. Noll, Russell Mello, Raymond Hill, Don E. Yansen, Frank F. Wenners, James P. Nadeau, Tuan Ngo, Michael Siebers
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284481
Alexandru Mueller, Ioana Petrini, Viorel Avramescu, Sergiu A. Iordanescu, Romolo Marcelli, Vittorio Foglietti, M. Dragoman
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284482
MEMS Technology and Devices
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284483
Manfred Weck, Joachim Huemmler, Bernd Petersen
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284484
Kenneth J. Skrobis, J. Christenson, Steve E. Staller, J. Freeman, Prashant Gadgil
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284485
Brady R. Davies, Stephen Montague, James H. Smith, Mark Lemkin
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284486
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284488
Poster Session-Monday
Weileun Fang
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284489
Denise M. Bruce
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284490
Jeffrey T. Borenstein, Douglas M. Preble
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284491
Qiang Zou, Deren Lu, Baoqing Li, Xingguo Xiong, Bin Xiong, Weiyuan Wang
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284492
Xingguo Xiong, Qiang Zou, Deren Lu, Weiyuan Wang
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284493
MEMS Materials
Holger Loewe, Wolfgang Ehrfeld, Joerg Diebel
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284494
MEMS Technology and Devices
Dean W. Matson, Peter M. Martin, Wendy D. Bennett, Donald C. Stewart, John W. Johnston
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284495
Poster Session-Monday
Runwen Wang, Beijun Shen, Hao Ding
Proceedings Volume Micromachining and Microfabrication Process Technology III, (1997) https://doi.org/10.1117/12.284496
Back to Top