X-ray scanner for the visualization of the spatial distribution of nanometer-scale roughness

Vladimir V. Protopopov; Kamil A. Valiev; Rafik M. Imamov

doi:10.1117/12.304391

1 April 1998 X-ray scanner for the visualization of the spatial distribution of nanometer-scale roughness

Vladimir V. Protopopov, Kamil A. Valiev, Rafik M. Imamov

Proceedings Volume 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II; (1998) https://doi.org/10.1117/12.304391
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

In the x-ray region, the reflection efficiency of a superpolished surface strongly depends on its roughness. This effect may be used to obtain a 2D map of the roughness spatial distribution for flat surfaces with a rms. roughness height of the order of one nanometer. The basic components of such a device are a precision mechanical 1D scanning stage and a temperature stabilized cooled x-ray linear detector array with quantum efficiency at CuK_(alpha ) radiation.

Citation Download Citation

Vladimir V. Protopopov, Kamil A. Valiev, and Rafik M. Imamov "X-ray scanner for the visualization of the spatial distribution of nanometer-scale roughness", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); https://doi.org/10.1117/12.304391

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