New single-mode optical waveguide on ceramic substrate utilizing siloxane polymer

Yuriko Ueno; Katsuhiro Kaneko; Shigeo Tanahashi

doi:10.1117/12.305477

20 April 1998 New single-mode optical waveguide on ceramic substrate utilizing siloxane polymer

Yuriko Ueno, Katsuhiro Kaneko, Shigeo Tanahashi

Proceedings Volume 3289, Micro-Optics Integration and Assemblies; (1998) https://doi.org/10.1117/12.305477
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

A new single-mode optical waveguide on a ceramic substrate has been developed to obtain opto-electronic multichip modules for use of high operating frequencies. Propagation loss of the single-mode optical waveguide formed on ceramic substrate is 0.14dB/cm for 1.3 micrometers wavelength.It is fabricated utilizing a siloxane polymer. The film of siloxane polymer can cut-off surface roughness of ceramic substrate. So the optical waveguide on ceramic substrate utilizing the siloxane polymer has fine optical characteristics.

Citation Download Citation

Yuriko Ueno, Katsuhiro Kaneko, and Shigeo Tanahashi "New single-mode optical waveguide on ceramic substrate utilizing siloxane polymer", Proc. SPIE 3289, Micro-Optics Integration and Assemblies, (20 April 1998); https://doi.org/10.1117/12.305477

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