Thin film resonators for TNT vapor detection

Paul H. Kobrin; Charles Seabury; Christopher Linnen; Alan B. Harker; Russell Chung; Robert Andrew McGill; Paul J. Matthews

doi:10.1117/12.324215

4 September 1998 Thin film resonators for TNT vapor detection

Paul H. Kobrin, Charles Seabury, Christopher Linnen, Alan B. Harker, Russell Chung, Robert Andrew McGill, Paul J. Matthews

Author Affiliations +

Proceedings Volume 3392, Detection and Remediation Technologies for Mines and Minelike Targets III; (1998) https://doi.org/10.1117/12.324215
Event: Aerospace/Defense Sensing and Controls, 1998, Orlando, FL, United States

Abstract

Progress on the development of a miniature mass transducer for low level vapor detection is described. Thin-film bulk acoustic wave resonators (TFRs) are fabricated with AlN as the piezoelectric layer onto an acoustically reflecting solid substrate. Q's of 200 at 2 GHz have been measured. Comparison of the sensitivity of these 2 GHz TFRs with 250 MHz surface acoustic wave resonators is made. A set of TFRs with species selective coatings has the potential of detecting TNT vapor at the sub PPT level. Detection of 5 ppb TNT with a signal to noise of 200:1 is demonstrated.

Citation Download Citation

Paul H. Kobrin, Charles Seabury, Christopher Linnen, Alan B. Harker, Russell Chung, Robert Andrew McGill, and Paul J. Matthews "Thin film resonators for TNT vapor detection", Proc. SPIE 3392, Detection and Remediation Technologies for Mines and Minelike Targets III, (4 September 1998); https://doi.org/10.1117/12.324215

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