Transient measurement of surface deflection for beams and membranes in micromechanical devices

Andreas Klein; Andreas Schroth; Gerald Gerlach; Ryutaro Maeda

doi:10.1117/12.307748

1 June 1998 Transient measurement of surface deflection for beams and membranes in micromechanical devices

Andreas Klein, Andreas Schroth, Gerald Gerlach, Ryutaro Maeda

Proceedings Volume 3411, Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (1998) https://doi.org/10.1117/12.307748
Event: Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 1998, Ancona, Italy

Abstract

This paper deals with the application of laser- interferometric vibration measurement for experimental characterization of beams and membranes in micromechanical devices. Such small structures are used in many sensor and actuator applications, where they represent the functional key elements. Due to the down-scaled geometrical size and to the fabrication process, the behavior is strongly influenced by many interactions and cross-coupling effects, which are extremely difficult to describe by theoretical models. For demonstration, two different examples are examined: a piezoelectric driven micropump and a 2D-scanning mirror device. The measured data can be compared to the simulated behavior of the structures, and contains important information for the optimum design of the devices. The two main conclusions are, that firstly certain effects of these devices can not be described by theoretical models alone, but have to be combined with experimental measurements, and secondly, that the deflection curvature of the structures must be determined by scanning rather than single-point measurements.

Citation Download Citation

Andreas Klein, Andreas Schroth, Gerald Gerlach, and Ryutaro Maeda "Transient measurement of surface deflection for beams and membranes in micromechanical devices", Proc. SPIE 3411, Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (1 June 1998); https://doi.org/10.1117/12.307748

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