Surface micromachined devices for microwave and photonic applications

M. Frank Chang; Ming C. Wu; JeyHsin Yao; M. Edward Motamedi

doi:10.1117/12.311012

22 June 1998 Surface micromachined devices for microwave and photonic applications

M. Frank Chang, Ming C. Wu, JeyHsin Yao, M. Edward Motamedi

Proceedings Volume 3419, Optoelectronic Materials and Devices; 34190S (1998) https://doi.org/10.1117/12.311012
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan

Abstract

As an enabling technology, Micro Electro Mechanical Systems (MEMS) have continuously provided new and improved design/implementation paradigms for a variety of scientific and engineering applications. In this paper, we review recent advances made in MEMS and its derivative MOEM devices for both microwave and photonic applications.

Citation Download Citation

M. Frank Chang, Ming C. Wu, JeyHsin Yao, and M. Edward Motamedi "Surface micromachined devices for microwave and photonic applications", Proc. SPIE 3419, Optoelectronic Materials and Devices, 34190S (22 June 1998); https://doi.org/10.1117/12.311012

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