Characteristics and compensation of the thickness effect in quantitative NEXAFS measurements

Christopher J. Buckley; Xiaodong Zhang

doi:10.1117/12.330351

6 November 1998 Characteristics and compensation of the thickness effect in quantitative NEXAFS measurements

Christopher J. Buckley, Xiaodong Zhang

Proceedings Volume 3449, X-Ray Microfocusing: Applications and Techniques; (1998) https://doi.org/10.1117/12.330351
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

The distortion of transmission spectra by the combination of monochromator band pass and sample attenuation has been modeled and characterized for soft x-ray energies. The model was used to predict the distortion to the transmission spectrum of CO₂ as obtained with a monochromator of moderate band pass. Experimental measurements of the CO₂ spectrum at a range of concentrations were used to confirm the validity of the model. The application of the model to overcome band pass and thickness distortions to the quantitative measurement of mass absorption coefficients and mass thickness are discussed.

Citation Download Citation

Christopher J. Buckley and Xiaodong Zhang "Characteristics and compensation of the thickness effect in quantitative NEXAFS measurements", Proc. SPIE 3449, X-Ray Microfocusing: Applications and Techniques, (6 November 1998); https://doi.org/10.1117/12.330351

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