Holographically recorded ion-etched variable-line-space gratings

Benoit Deville; Francis Bonnemason; Jean Flamand; Viviane Millet; Alain Thevenon; Virginie Gattino; Bruno M. Touzet

doi:10.1117/12.323412

24 September 1998 Holographically recorded ion-etched variable-line-space gratings

Benoit Deville, Francis Bonnemason, Jean Flamand, Viviane Millet, Alain Thevenon, Virginie Gattino, Bruno M. Touzet

Proceedings Volume 3450, Theory and Practice of Surface-Relief Diffraction Gratings: Synchrotron and Other Applications; (1998) https://doi.org/10.1117/12.323412
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Variable line space (VLS) diffraction gratings present interesting solutions to design high resolution monochromators for synchrotrons. The problem is to be able to record holographically the desired grooves distribution in order to take advantage of the holographic recording and ion etching process: low stray light, absence of ghosts and second order reduction. We will review the method of calculation of VLS diffraction gratings recorded holographically by using spherical and aspherical laser wavefronts. Then the manufacture of these gratings (accuracy of recording and ion etching process) will be described. We will give an example. And finally, the theory and the accuracy of a checking method will be presented.

Citation Download Citation

Benoit Deville, Francis Bonnemason, Jean Flamand, Viviane Millet, Alain Thevenon, Virginie Gattino, and Bruno M. Touzet "Holographically recorded ion-etched variable-line-space gratings", Proc. SPIE 3450, Theory and Practice of Surface-Relief Diffraction Gratings: Synchrotron and Other Applications, (24 September 1998); https://doi.org/10.1117/12.323412

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available