Solution of the incorrect inverse ellipsometric problem

V. V. Bobro; Anatolij S. Mardezhov; A. I. Semenenko

doi:10.1117/12.328252

21 October 1998 Solution of the incorrect inverse ellipsometric problem

V. V. Bobro, Anatolij S. Mardezhov, A. I. Semenenko

Proceedings Volume 3485, 11th International Vavilov Conference on Nonlinear Optics; (1998) https://doi.org/10.1117/12.328252
Event: Eleventh International Vavilov Conference on Nonlinear Optics, 1997, Novosibirsk, Russian Federation

Abstract

The present work is devoted to the analysis of the ill-posed inverse ellipsometric problem. Manifestations of the incorrectness of the problem are described for the case of ultrathin films. Special attention is given to the choice of the criteria for the optimal point. It is shown that an obvious and frequently used criterion expressed as a condition on difference functional S_o less than or equal to (delta) ², where (delta) is an average error in the measurement polarization angles, is practically useless in our case in the region strong incorrectness. New criteria for the choice of the optimal point are therefore suggested. As a result, the stable solution of the inverse ellipsometric problem is obtained which permits to study successfully the surface films in the thickness range 2 - 10 nm.

Citation Download Citation

V. V. Bobro, Anatolij S. Mardezhov, and A. I. Semenenko "Solution of the incorrect inverse ellipsometric problem", Proc. SPIE 3485, 11th International Vavilov Conference on Nonlinear Optics, (21 October 1998); https://doi.org/10.1117/12.328252

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