PtSi Schottky-barrier infared focal plane arrays

Masafumi Kimata; Tatsuo Ozeki; Natsuro Tsubouchi; Sho Ito

doi:10.1117/12.317841

18 August 1998 PtSi Schottky-barrier infared focal plane arrays

Masafumi Kimata, Tatsuo Ozeki, Natsuro Tsubouchi, Sho Ito

Proceedings Volume 3505, Imaging System Technology for Remote Sensing; (1998) https://doi.org/10.1117/12.317841
Event: Asia-Pacific Symposium on Remote Sensing of the Atmosphere, Environment, and Space, 1998, Beijing, China

Abstract

PtSi Schottky-barrier (SB) FPAs have been developed for ground-based thermal imaging and spaceborne remote sensing applications, making the best possible use of its process compatibility with Si LSIs. The FPAs for mid wavelength IR thermal imaging are large format 2D arrays with several array sizes up to 1040 X 1040. An original readout architecture called the Charge Sweep Device has contributed to enhancing their sensitivities, and our state-of-the-art technology has reached a level which realizes FPAs with NETDs of the order of 30 mK. Extending the SB FPA technology to the short wavelength IR spectral region has made it possible to exploit spaceborne remote sensing applications. The space-grade performance and reliability have been demonstrated with a 4096 element and 2100 element linear FPAs.

Citation Download Citation

Masafumi Kimata, Tatsuo Ozeki, Natsuro Tsubouchi, and Sho Ito "PtSi Schottky-barrier infared focal plane arrays", Proc. SPIE 3505, Imaging System Technology for Remote Sensing, (18 August 1998); https://doi.org/10.1117/12.317841

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