Technological sensors on slow electromagnetic waves

Yuri N. Pchelnikov; Andrey A. Yelizarov

doi:10.1117/12.324350

3 September 1998 Technological sensors on slow electromagnetic waves

Yuri N. Pchelnikov, Andrey A. Yelizarov

Proceedings Volume 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV; (1998) https://doi.org/10.1117/12.324350
Event: Microelectronic Manufacturing, 1998, Santa Clara, CA, United States

Abstract

New methods for physical and technological parameters measurements are demonstrated. These methods are based on slow-wave structures application as sensitive elements and are using the dependence of phase velocity in slow-wave structure upon parameters of medium and the distance between slow-wave structure's conductors and between a slow-ave structure and other conductive surfaces. The phase velocity alteration leads to a sensitive element resonant frequency alteration which can be converted into a measuring generator frequency alteration. The peculiarities and advantages of slow-wave structure-based sensitive elements are considered. The possibility of the new method application in microelectronics and other brands of industry are shown. The practical realization of the mentioned above method have confirmed its sensitivity, accuracy and simplicity. It is shown that the use of sensitive elements based on the slow- wave structures is extremely promising in different technological processes and scientific research. Resistivity, permittivity, and permeability, thickness, continuity, linear and angular displacement, vibration, and many other physical and geometric parameters can be measured with high accuracy.

Citation Download Citation

Yuri N. Pchelnikov and Andrey A. Yelizarov "Technological sensors on slow electromagnetic waves", Proc. SPIE 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV, (3 September 1998); https://doi.org/10.1117/12.324350

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