Optical and structural characteristics of InGaAs/GaAs strained-layer superlattice

Mei Li; Xueqian Li; Xiaowei Song; Zhongjiu Ge; Xingde Zhang

doi:10.1117/12.318274

5 August 1998 Optical and structural characteristics of InGaAs/GaAs strained-layer superlattice

Mei Li, Xueqian Li, Xiaowei Song, Zhongjiu Ge, Xingde Zhang

Proceedings Volume 3557, Current Developments in Optical Elements and Manufacturing; (1998) https://doi.org/10.1117/12.318274
Event: Photonics China '98, 1998, Beijing, China

Abstract

In the present work, the structure characteristics on InGaAs-GaAs/GaAs strained-layer superlattice (SLS) samples have been studied by measuring x-ray double crystal rocking curve in the non-paralle (+.-) setting and photoluminescence (PL), respectively. Using x-ray kinematical theory, we have calculated structure parameters of SLS and discussed the influence of different substrates. Computer simulation of experimental curve have been performed with kinematical diffraction theory. The experimental and simulated curves are basically identical. Reliability of calculated results using x-ray double rocking curve is further confined by PL.

Citation Download Citation

Mei Li, Xueqian Li, Xiaowei Song, Zhongjiu Ge, and Xingde Zhang "Optical and structural characteristics of InGaAs/GaAs strained-layer superlattice", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); https://doi.org/10.1117/12.318274

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