Paper
19 August 1998 Fabrication and properties of light spiral filters
Miroslav Miler, Ivo Aubrecht, Ivo Koudela, Jaroslav Wagner
Author Affiliations +
Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.324565
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary
Abstract
A simple technique of obtaining light spiral (helium) filters in UV exposed photoresist layers consisting in a combined use of binary masks and revolution of the photosensitive layers during exposition is presented. The filters investigated experimentally are inspected by observing intensity distribution in a laser beam reflected from the sample. The filter giving the angular phase shift variation which is close to that needed for the generation of the first order Bessel beam is realized.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Miroslav Miler, Ivo Aubrecht, Ivo Koudela, and Jaroslav Wagner "Fabrication and properties of light spiral filters", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.324565
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Cited by 2 scholarly publications.
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KEYWORDS
Optical filters

Photoresist materials

Inspection

Phase shifts

Linear filtering

Optical components

Tin

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