Measurement of scatter from PSL standard spheres deposited on disk surfaces

Craig A. Scheer; John C. Stover

doi:10.1117/12.343714

29 March 1999 Measurement of scatter from PSL standard spheres deposited on disk surfaces

Craig A. Scheer, John C. Stover

Proceedings Volume 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1999) https://doi.org/10.1117/12.343714
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

Accurately sized PSL spheres of several diameters are deposited on disks. Scatter from the depositions is measured and compared to the results of a model for surface bound particles. The results are important for two reasons. The measurements will help provide an early database for determining the smallest detectable particles for a given disk texture. Secondly, the use of these particular PSL spheres, which have been accurately sized to about 1% of their diameter, will be important for establishing particle standards for the disk industry.

Citation Download Citation

Craig A. Scheer and John C. Stover "Measurement of scatter from PSL standard spheres deposited on disk surfaces", Proc. SPIE 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, (29 March 1999); https://doi.org/10.1117/12.343714

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