Applications of ordinary two-beam shearing interferometry to (1) aberration measurements of an optical system, (2) aberration correction of an optical system, and of Multiple Beam Shearing Interferometry (MBSI), (3) beam collimation, (4) focal length measurements, and (5) a position magnifying sensor, are described. For two-beam shearing interferometry, a holographic shearing interferometer with two separated three-beam holograms, is used. For MBSI, a shear plate with two flat surfaces of glass, wedged at a small angle and coated to obtain high reflectivity, is used. Theoretical and experimental results are presented for both situations.
|