Noncontact high-precision surface 3D profiler

Jianfeng Jiang; Yonghui He; Wansheng Zhao

doi:10.1117/12.366700

25 October 1999 Noncontact high-precision surface 3D profiler

Jianfeng Jiang, Yonghui He, Wansheng Zhao

Proceedings Volume 3784, Rough Surface Scattering and Contamination; (1999) https://doi.org/10.1117/12.366700
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

This paper presents a system to measure three-dimensional profile of a surface, based on the principle of scanning white light interferometry. It adopts a basic structure of Michelson interferometer and semiautomatic fast focus-adjusting mechanism. Through increasing the sampling frequency and applying the feature extracting algorithm, the precision and efficiency of measurement can be increased together.

Citation Download Citation

Jianfeng Jiang, Yonghui He, and Wansheng Zhao "Noncontact high-precision surface 3D profiler", Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); https://doi.org/10.1117/12.366700

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