Electrostatic microshutters-micromirrors array for light modulation systems

Marco Pizzi; Valerian Koniachkine; Elena Bassino; Sabino Sinesi; Piero P. Perlo

doi:10.1117/12.361258

2 September 1999 Electrostatic microshutters-micromirrors array for light modulation systems

Marco Pizzi, Valerian Koniachkine, Elena Bassino, Sabino Sinesi, Piero P. Perlo

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361258
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

A light modulation system based on microactuators array is reported. Electrostatically driven microstructures can close or open parts of a transparent substrate (glass in the visible range) modulating the incident light. The surface of the microstructures can be used as shutter or as mirror or simultaneously in both functions. Each microactuator of the array is made by three main parts: a rigid electrode coated on the substrate, a dielectric layer and a flexible electrode (cantilever). The flexible electrode is fixed at one end on the dielectric: elastic forces keep the cantilever suspended. The substrate and the rigid electrode are transparent. Applying an appropriate voltage between the electrodes, the flexible one changes its position, rolling on the surface of the dielectric. The previous transparent area becomes reflective. Photolithography and thin film technologies have been used to build microshutter-micromirror arrays. Preliminary electrical and optical tests are presented in this paper.

Citation Download Citation

Marco Pizzi, Valerian Koniachkine, Elena Bassino, Sabino Sinesi, and Piero P. Perlo "Electrostatic microshutters-micromirrors array for light modulation systems", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361258

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