Excimer surface treatment of sol gel coatings

Bruno Godard; Sylvie Janicot; Guillaume Lathus; Michel Pealat; Eric Fogarassy

doi:10.1117/12.376972

1 February 2000 Excimer surface treatment of sol gel coatings

Bruno Godard, Sylvie Janicot, Guillaume Lathus, Michel Pealat, Eric Fogarassy

Proceedings Volume 3885, High-Power Laser Ablation II; (2000) https://doi.org/10.1117/12.376972
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan

Abstract

Sol-gel coatings are finding increased applications in fields as diverse as traditional optical coatings (eg anti- and high-reflectance) and microelectronic devices. Following the deposition process heat treatment is required to densify or crystallize the films. The disadvantage of conventional heat treatment, by hot plate or oven, is the limit on temperature and time set either by the thermal stability of the materials or by interactions between film and substrate. A study has been made of the use of excimer lasers for heat treatment of PZT (PbZrO₃:PbTiO₃) sol-gel films, the main application being pyroelectric detector arrays.

Citation Download Citation

Bruno Godard, Sylvie Janicot, Guillaume Lathus, Michel Pealat, and Eric Fogarassy "Excimer surface treatment of sol gel coatings", Proc. SPIE 3885, High-Power Laser Ablation II, (1 February 2000); https://doi.org/10.1117/12.376972

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