Focused ion beam: moving toward nanobiotechnology

Marziale Milani; Monica Ballerini; Franco Squadrini

doi:10.1117/12.383351

21 April 2000 Focused ion beam: moving toward nanobiotechnology

Marziale Milani, Monica Ballerini, Franco Squadrini

Proceedings Volume 3922, Scanning and Force Microscopies for Biomedical Applications II; (2000) https://doi.org/10.1117/12.383351
Event: BiOS 2000 The International Symposium on Biomedical Optics, 2000, San Jose, CA, United States

Abstract

A new technique of focused ion beam (FIB) microscopy/nanomachining is proposed. Ultrahigh resolution 3D tomography can be performed on whole cell, without preparation. Very fast imaging times allow quasi real time microscopy. FIB is a source of ions which can be precisely oriented and focused on the sample. The resolution can be as low as 15 nm. Higher currents produce 'cutting' and 'attaching' operations of very high precision where at the same time the resulting secondary ions and electrons again provide follow up sample imaging.

Citation Download Citation

Marziale Milani, Monica Ballerini, and Franco Squadrini "Focused ion beam: moving toward nanobiotechnology", Proc. SPIE 3922, Scanning and Force Microscopies for Biomedical Applications II, (21 April 2000); https://doi.org/10.1117/12.383351

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