Glass-based integrated optic pressure sensors with a Mach-Zehnder interferometer and with an intermodal interferometer

Masashi Ohkawa; Chikara Nishiwaki; Kazuhiko Hasebe; Seishi Sekine; Takashi Sato

doi:10.1117/12.379963

24 March 2000 Glass-based integrated optic pressure sensors with a Mach-Zehnder interferometer and with an intermodal interferometer

Masashi Ohkawa, Chikara Nishiwaki, Kazuhiko Hasebe, Seishi Sekine, Takashi Sato

Author Affiliations +

Proceedings Volume 3936, Integrated Optics Devices IV; (2000) https://doi.org/10.1117/12.379963
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

We have theoretically and experimentally investigated the fundamental characteristics of glass-based integrated optic pressure sensors with a conventional Mach-Zehnder (MZ) interferometer and with an intermodal (IM) interferometer consisting of a straight waveguide. Each sensor has a rectangular diaphragm as a pressure-sensitive mechanical structure. The sensing path of the MZ interferometer and the waveguide of the IM interferometer should be placed along the diaphragm edge to maximize the sensitivity of the sensors based on the elasto-optic effect. IF the deflection of the diaphragm is small, the phase difference either between the sensing and reference waves for the MZ interferometer or between the fundamental TM-like and TE- like modes for the IM interferometer is proportional to the applied pressure. The sensors were fabricated using two glass substrates: a 0.3mm-thick Corning 0211 glass and a thick soda-lime glass with a 10mm X 10mm hole. After forming the waveguide on the 0211 glass, both substrates were bonded together with optical cement. For each sensor, the dimensions of the diaphragm were 10mm X 10mm X 0.3mm and the interaction length was 10mm. The sensitivities measured at 633nm in wavelength were 0.053rad/kPa for the MZ interferometer using the TM-like mode and 0.041rad/lPa for the IM interferometer. Each result was, however, half its theoretical estimate.

Citation Download Citation

Masashi Ohkawa, Chikara Nishiwaki, Kazuhiko Hasebe, Seishi Sekine, and Takashi Sato "Glass-based integrated optic pressure sensors with a Mach-Zehnder interferometer and with an intermodal interferometer", Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); https://doi.org/10.1117/12.379963

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