Thermo-optic phase modulators in SIMOX material

Stewart A. Clark; Brian Culshaw; Emma J.C. Dawnay; Ian E. Day

doi:10.1117/12.379940

24 March 2000 Thermo-optic phase modulators in SIMOX material

Stewart A. Clark, Brian Culshaw, Emma J.C. Dawnay, Ian E. Day

Proceedings Volume 3936, Integrated Optics Devices IV; (2000) https://doi.org/10.1117/12.379940
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

An investigation of a series of low-power thermo-optic phase-modulating devices fabricated in SIMOX material suitable for use in distributed sensing or as optical variable attenuators is presented. These devices are integrated in a balanced Mach-Zehnder Interferometer utilizing multi-micron vertical sidewall rib waveguides and exhibit low polarization dependence. The investigation highlights the power consumption of various lengths of devices with low-lateral heat diffusion operated by ohmic heating and quantifies the attainable modulation depths under quasi-static operation. Non-linear device behavior is demonstrated and explained with a proposal for these characteristics giving rise to devices which would operate with further power reductions. AC characteristics are also investigated, showing the modulation to have 3 dB bandwidths of approximately 40kHz. A second device geometry is presented which was fabricated utilizing an under-etching technique to suspend the arms of the Mach-Zehnder. Results indicate lower power operation with a corresponding reduction in bandwidth to approximately 1kHz. An improvement in overall device geometry provides modulation depths in excess of 99 percent, independent of both bandwidth and power.

Citation Download Citation

Stewart A. Clark, Brian Culshaw, Emma J.C. Dawnay, and Ian E. Day "Thermo-optic phase modulators in SIMOX material", Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); https://doi.org/10.1117/12.379940

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