Combinatorial synthesis and high-throughput evaluation of doped TiO2 thin films for the development of photocatalysts

Yuji Matsumoto; Makoto Murakami; Zhengwu Jin; Akira Nakayama; Tetsuo Yamaguchi; Takashi Ohmori; Eiji Suzuki; Satoshi Nomura; Masashi Kawasaki; Hideomi Koinuma

doi:10.1117/12.385421

17 May 2000 Combinatorial synthesis and high-throughput evaluation of doped TiO₂ thin films for the development of photocatalysts

Yuji Matsumoto, Makoto Murakami, Zhengwu Jin, Akira Nakayama, Tetsuo Yamaguchi, Takashi Ohmori, Eiji Suzuki, Satoshi Nomura, Masashi Kawasaki, Hideomi Koinuma

Author Affiliations +

Proceedings Volume 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development; (2000) https://doi.org/10.1117/12.385421
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

TiO₂ thin films doped with various transition metals were systematically fabricated by combinatorial laser MBE technique. Alternating KrF excimer laser ((lambda) equals 248 nm) ablation of TiO₂ and Ti_1-x M_xO₂ (M equals transition metal) was employed to deposit combinatorial library of 18 samples for each dopant with different concentrations. Anatase films with c-axis orientation were grown epitaxially on SrTiO₃(001) substrate while the rutile phase films with a-axis orientation were on Al₂O₃(0001) substrate. Solid solubility of transition metals in both the phases was determined by X-ray diffraction. The anatase phase was found to dissolve the transition metals in higher concentrations than rutile phase. The parallel evaluation of the photocatalytic activity of the doped TiO₂ in combinatorial libraries was performed with respect to photo-decomposition of water in presence of a small amount of oxidizing or reducing agent which induced pH changes on the pixels. The high throughput evaluation of combinatorially deposited photocatalytic thin films was realized by adopting a potentiometric pH field effect transistor for sensing such pH changes.

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Yuji Matsumoto, Makoto Murakami, Zhengwu Jin, Akira Nakayama, Tetsuo Yamaguchi, Takashi Ohmori, Eiji Suzuki, Satoshi Nomura, Masashi Kawasaki, and Hideomi Koinuma "Combinatorial synthesis and high-throughput evaluation of doped TiO₂ thin films for the development of photocatalysts", Proc. SPIE 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development, (17 May 2000); https://doi.org/10.1117/12.385421

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