Comparison of ANOVA and Latin square measurement system analysis techniques

John A. Allgair

doi:10.1117/12.386540

2 June 2000 Comparison of ANOVA and Latin square measurement system analysis techniques

John A. Allgair

Proceedings Volume 3998, Metrology, Inspection, and Process Control for Microlithography XIV; (2000) https://doi.org/10.1117/12.386540
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

Measurement system analysis is essential for determining the quality of data used for process control. Analysis of variation, or ANOVA, is a commonly used technique for measurement system analysis. Recently, the Advanced Metrology Advisory Group at SEMATECH has proposed using the Latin Square technique for determining the reproducibility and repeatability of a CD SEM. Advantages and disadvantages of the two techniques will be discussed.

Citation Download Citation

John A. Allgair "Comparison of ANOVA and Latin square measurement system analysis techniques", Proc. SPIE 3998, Metrology, Inspection, and Process Control for Microlithography XIV, (2 June 2000); https://doi.org/10.1117/12.386540

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