Precision improvement in ellipsometric-type measurements for the refraction index using numerical code processing

Andrei Belea; M. Bulinski

doi:10.1117/12.378697

23 February 2000 Precision improvement in ellipsometric-type measurements for the refraction index using numerical code processing

Andrei Belea, M. Bulinski

Author Affiliations +

Proceedings Volume 4068, SIOEL '99: Sixth Symposium on Optoelectronics; (2000) https://doi.org/10.1117/12.378697
Event: SIOEL: Sixth Symposium of Optoelectronics, 1999, Bucharest, Romania

Abstract

Using a numerical code assisted data processing we show that the precision in the ellipsometric type measurements can be improved with a sufficient degree of confidence, up to an order of magnitude. Our method is based on fitting the experimental data with a pari of functions of known theoretical behavior. Essentially, we corroborate the result obtained from one strongly nonlinear function to those given by another behaving 'ultra-linearly'. When working with consistent experimental data, this procedure leads to a pair of 'outputs' that enhance one another producing an increased degree of precision. The paper explicitly applies this idea to an ellipsometric type measurement for the refraction index of a glass specimen.

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Andrei Belea and M. Bulinski "Precision improvement in ellipsometric-type measurements for the refraction index using numerical code processing", Proc. SPIE 4068, SIOEL '99: Sixth Symposium on Optoelectronics, (23 February 2000); https://doi.org/10.1117/12.378697

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