Electronic and structural properties of InN thin films grown by MOMBE on sapphire substrates

Jochen Aderhold; V. Yu. Davydov; F. Fedler; Harald Klausing; David Mistele; T. Rotter; O. Semchinova; Jens Stemmer; Jurgen Graul

doi:10.1117/12.408343

29 November 2000 Electronic and structural properties of InN thin films grown by MOMBE on sapphire substrates

Jochen Aderhold, V. Yu. Davydov, F. Fedler, Harald Klausing, David Mistele, T. Rotter, O. Semchinova, Jens Stemmer, Jurgen Graul

Author Affiliations +

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408343
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

The development of high quality semiconductor thin films for different applications is a demanding problem in material science. InN has not been an intensively studied as AlN and GaN. There is relatively little information on the fundamental optical properties, charge carrier transport, and the properties and behavior of electrically active defects in the material. The absence of good-quality material lead even to conflicting data reported in the literature concerning the optical gap and band structure. In this publication it will be shown that InN thin films can be successfully grown using the MO MBE method. For the first time the proper choice of growth conditions allows to obtain good quality InN thin films with a charge carrier concentration as low as 8.8 X 10¹⁸ cm^-3.

Citation Download Citation

Jochen Aderhold, V. Yu. Davydov, F. Fedler, Harald Klausing, David Mistele, T. Rotter, O. Semchinova, Jens Stemmer, and Jurgen Graul "Electronic and structural properties of InN thin films grown by MOMBE on sapphire substrates", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408343

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available