Platinum silicide formation during pulsed laser annealing prepared by pulsed laser deposition

Meicheng Li; Xuekang Chen; Jing Wang; Jianping Yang; Gan Wu; Liancheng Zhao

doi:10.1117/12.408391

29 November 2000 Platinum silicide formation during pulsed laser annealing prepared by pulsed laser deposition

Meicheng Li, Xuekang Chen, Jing Wang, Jianping Yang, Gan Wu, Liancheng Zhao

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408391
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

The formation of PtSi ultra-thin film prepared by pulsed laser deposition during pulsed laser annealing has been studied. The growth sequence of the Pt₂Si and the PtSi phases that evolved as the result of the diffusion reaction in the bilayers was monitored by X-ray photoelectron spectrum (XPS). The structure characteristics of PtSi thin films prepared by different preparing conditions were investigated by X-ray diffraction and XPS. Compared to conventional furnace anneal, we got superior uniformity, lower continuous film thickness of the resulting PtSi layers and smoother PtSi/Si interfaces.

Citation Download Citation

Meicheng Li, Xuekang Chen, Jing Wang, Jianping Yang, Gan Wu, and Liancheng Zhao "Platinum silicide formation during pulsed laser annealing prepared by pulsed laser deposition", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408391

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available