Triangulation-based sensor for noncontact micro- and nanotopographic surface inspection

Manuel Filipe M. Costa

doi:10.1117/12.406371

15 December 2000 Triangulation-based sensor for noncontact micro- and nanotopographic surface inspection

Manuel Filipe M. Costa

Proceedings Volume 4087, Applications of Photonic Technology 4; (2000) https://doi.org/10.1117/12.406371
Event: 2000 International Conference on Application of Photonic Technology (ICAPT 2000), 2000, Quebec City, Canada

Abstract

New developments of the main sensor of the MICROTOP' family of microtopographers are presented. Increased versatility, reliability, with larger measuring range, better accuracy and resolution that now can be driven down to the nanometer range, were achieved in the new MICROTOP.06.MFC. Optical triangulation with normal and specular observation under oblique incidence and angle resolved scattering are combined to give reliable roughness and full microtopographic inspection of a large range of surfaces and roughness regimes.

Citation Download Citation

Manuel Filipe M. Costa "Triangulation-based sensor for noncontact micro- and nanotopographic surface inspection", Proc. SPIE 4087, Applications of Photonic Technology 4, (15 December 2000); https://doi.org/10.1117/12.406371

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