Facility for the curvature-based measurement of the nanotopography of complex surfaces

Peter Thomsen-Schmidt; Michael Schulz; Ingolf Weingaertner

doi:10.1117/12.401615

29 September 2000 Facility for the curvature-based measurement of the nanotopography of complex surfaces

Peter Thomsen-Schmidt, Michael Schulz, Ingolf Weingaertner

Proceedings Volume 4098, Optical Devices and Diagnostics in Materials Science; (2000) https://doi.org/10.1117/12.401615
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

An apparatus for measuring the topographies of complex surfaces with high accuracy by curvature scanning has been setup. For this purpose, a new type of curvature sensor that processes information from a relatively large area of the surface under test is moved along the surface. The principles advantages and a technical realization of this method referred to as large-area curvature scanning will be presented.

Citation Download Citation

Peter Thomsen-Schmidt, Michael Schulz, and Ingolf Weingaertner "Facility for the curvature-based measurement of the nanotopography of complex surfaces", Proc. SPIE 4098, Optical Devices and Diagnostics in Materials Science, (29 September 2000); https://doi.org/10.1117/12.401615

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