Portable diagnostics for EUV light sources

R. Stuik; Raluca C. Constantinescu; Petra Hegeman; Jeroen Jonkers; H. F. Fledderus; Vadim Banine; Fred Bijkerk

doi:10.1117/12.406663

8 November 2000 Portable diagnostics for EUV light sources

R. Stuik, Raluca C. Constantinescu, Petra Hegeman, Jeroen Jonkers, H. F. Fledderus, Vadim Banine, Fred Bijkerk

Proceedings Volume 4146, Soft X-Ray and EUV Imaging Systems; (2000) https://doi.org/10.1117/12.406663
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

The EUV light source is a critical factor for the success of Extreme Ultraviolet Lithography (EULV), ASML, FOM and Philips Research have developed a portable set of diagnostics for the characterization of candidate EUV sources, called Flying Circus. The set of diagnostics is used to perform the following measurements: Absolute EUV power measurements, pulse-to-pulse intensity fluctuations, plasma size and shape, size/shape/positional stability, spectral distribution of radiation and stability, timing jitter and contamination by the source. These measurements are to be performed on-site, at the laboratories of the different source developers. The design as well as the first calibration measurements performed by the Flying Circus on the FOM Xe double gas jet source and on the PLEX z-pinch source will be discussed.

Citation Download Citation

R. Stuik, Raluca C. Constantinescu, Petra Hegeman, Jeroen Jonkers, H. F. Fledderus, Vadim Banine, and Fred Bijkerk "Portable diagnostics for EUV light sources", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); https://doi.org/10.1117/12.406663

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