Anisotropically etched Si molds for fabricating fine optical components

Yigui Li; Takehiro Fujii; Minoru Sasaki; Kazuhiro Hane

doi:10.1117/12.396473

25 August 2000 Anisotropically etched Si molds for fabricating fine optical components

Yigui Li, Takehiro Fujii, Minoru Sasaki, Kazuhiro Hane

Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396473
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Here we demonstrate two fine optical components fabricated by replica-molding from anisotropically etched Si molds. One component is microcavity in micro-scales and the other is grating computer with a pitch of 500 nanometer. We investigated the feasibility of two methods for the microfabrication of the SI molds: one method is for making hundreds of micrometer size Si molds by using conventional photolithography and reactive ion etching technique combined with post anisotropical crystalline etching; and the other is for fabrication of micro periodic structure in optical waveguide was presented. Periodicities in excess of 5000 lines/mm were successfully transferred from silicon mold to polymer layer. The yield, repeatability and efficiency of the original master are very good. This technique can also be used to fabricate other nanometer-scale structures.

Citation Download Citation

Yigui Li, Takehiro Fujii, Minoru Sasaki, and Kazuhiro Hane "Anisotropically etched Si molds for fabricating fine optical components", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396473

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available