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25 August 2000 Flexible processing of large scale LCD panels using scanner-deflected UV-laser radiation
Andreas Ostendorf, Klaus Koerber, Thorsten Temme, Bob Bann, Paul Apte, Heinz Haberzettl, Tatjana Budischewski
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Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396441
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
In this paper, a technology and a machine tool is presented, which can be implemented in the production of Liquid Crystal Displays (LCDs), leading to a higher flexibility and reduced manufacturing costs. The developed technology focuses on the generation of transfer points by selective removal of polyimide on an Indium Tin Oxide layer with UV-laser radiation, thus replacing the conventional stamping method with cliches. With the combination of xy-stages and galvanometer scanner beam deflection, panels with dimensions of up to 400 by 500 mm2 can be processed. On test panels, the required 2000 transfer points, distribute on the entire panel, can be processed in step and scan mode in about 30 s with an accuracy of better than 20 micrometers . The yield of the new technology in terms of working displays is comparable to the current technology. Besides LCD production, the developed machine tool has a high potential in the field of micro and precision engineering on large scale panels. The machine is highly versatile and can be used to perform a wide variety of processes in organic and inorganic materials for volume production as well as for research.
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Andreas Ostendorf, Klaus Koerber, Thorsten Temme, Bob Bann, Paul Apte, Heinz Haberzettl, and Tatjana Budischewski "Flexible processing of large scale LCD panels using scanner-deflected UV-laser radiation", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396441
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KEYWORDS
LCDs
Indium
Manufacturing
Oxides
Scanners
Tin
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