Microfluidics in environmental monitoring: a proposed mechanism for anisotropic wet chemical etching of c-Si

Rob Korch; Vassili Karanassios

doi:10.1117/12.417438

26 February 2001 Microfluidics in environmental monitoring: a proposed mechanism for anisotropic wet chemical etching of c-Si

Rob Korch, Vassili Karanassios

Author Affiliations +

Proceedings Volume 4205, Advanced Environmental and Chemical Sensing Technology; (2001) https://doi.org/10.1117/12.417438
Event: Environmental and Industrial Sensing, 2000, Boston, MA, United States

Abstract

In many chemical measurements, a sample must be transported from an inlet, to a measurement "cell" to a detector regardless of size of the measurement system. For micro-instruments that may be used in environmental monitoring applications, micro-fluidics provides a irreplaceable way of transporting gaseous or liquid micro-samples from inlet to outlet. Micro-channels and micro-cells can be fabricated using anisotropic wet chemical etching and crystalline Si (c-Si). Despite wide applicability ofthe approach, the mechanism of anisotropic wet chemical etching of c-Si is not well understood. In this paper, a proposed reaction mechanism for such etching is discussed in detail.

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Rob Korch and Vassili Karanassios "Microfluidics in environmental monitoring: a proposed mechanism for anisotropic wet chemical etching of c-Si", Proc. SPIE 4205, Advanced Environmental and Chemical Sensing Technology, (26 February 2001); https://doi.org/10.1117/12.417438

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