In-situ measurements of large external diameters by a heterodyne laser interferometer

Qibo Feng; Jinwen Liang

doi:10.1117/12.401748

5 October 2000 In-situ measurements of large external diameters by a heterodyne laser interferometer

Qibo Feng, Jinwen Liang

Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401748
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

A laser heterodyne interferometer has been widely used for a long time in industry, and it has advantages of both large measurement range and high accuracy. SO, how to directly use this highly precise laser interferometer for measuring dimensions of large-scale workpieces, especially large diameters, is a target to b pursued. Due to the difficulties of aiming at and positioning the measured points in the measurements of large workpieces, this problem has not been solved up to now. Here, a novel and very simple method of aiming at and positioning the measured points in the dimension measurement of a large-scale workpiece by a single laser beam is put forward, and high-precision measurements of large dimensions can be realized by a commercial available laser heterodyne interferometer. High accuracy, large measurement range and convenience of operation are some distinguishing features of this method. The experiment results on both a 1000mm-gauge block and a 500mm-diameter shoed that the uncertainty within 5 micrometers in measuring a one meter diameter was obtained by the system.

Citation Download Citation

Qibo Feng and Jinwen Liang "In-situ measurements of large external diameters by a heterodyne laser interferometer", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401748

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