Progress on development of prototype laser reference system for stylus profilometry of large optics

Ho-Soon Yang; David D. Walker

doi:10.1117/12.454885

5 February 2002 Progress on development of prototype laser reference system for stylus profilometry of large optics

Ho-Soon Yang, David D. Walker

Proceedings Volume 4411, Large Lenses and Prisms; (2002) https://doi.org/10.1117/12.454885
Event: Large Lenses and Prisms, 2001, London, United Kingdom

Abstract

In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.

Citation Download Citation

Ho-Soon Yang and David D. Walker "Progress on development of prototype laser reference system for stylus profilometry of large optics", Proc. SPIE 4411, Large Lenses and Prisms, (5 February 2002); https://doi.org/10.1117/12.454885

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