Comparison of machining strategies for ceramics using frequency-converted Nd:YAG and excimer lasers

Hans Kurt Toenshoff; Andreas Ostendorf; Klaus Koerber; Klaus Meyer

doi:10.1117/12.456888

25 February 2002 Comparison of machining strategies for ceramics using frequency-converted Nd:YAG and excimer lasers

Hans Kurt Toenshoff, Andreas Ostendorf, Klaus Koerber, Klaus Meyer

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456888
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

This paper compares the machining strategies for ceramics using a frequency converted (3(omega) ) Nd:YAG laser and a KrF excimer laser. In respect to the substantially different beam characteristics of these lasers, it is also a comparison of laser structuring methods using a focusing or an imaging optical system. The presentation concentrates on the quality of the machined structures and on the processing time of micro cutting and drilling with these two laser systems. An innovative approach for the manufacturing of micro holes, based on a newly developed mask technology, is presented for the first time.

Citation Download Citation

Hans Kurt Toenshoff, Andreas Ostendorf, Klaus Koerber, and Klaus Meyer "Comparison of machining strategies for ceramics using frequency-converted Nd:YAG and excimer lasers", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456888

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