Technology for integrated spatial light modulators based on reflective membranes

Serhat Sakarya; Gleb V. Vdovin; Pasqualina M. Sarro

doi:10.1117/12.454711

1 February 2002 Technology for integrated spatial light modulators based on reflective membranes

Serhat Sakarya, Gleb V. Vdovin, Pasqualina M. Sarro

Proceedings Volume 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III; (2002) https://doi.org/10.1117/12.454711
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Two approaches toward the fabrication of a spatial light modulator are presented. The first approach uses a pixelated nitride membrane that is suspended by a grid structure over an electrode array. Deformation of each membrane segment is achieved by means of electrostatic attraction. By using a continuous reflective surface, we achieve a 100% optical fill factor. Since we can coat with any metal or combination of materials, these devices can, in principle, handle high optical loads over a wide spectral range. We have tried different spacer materials and dimensions with this approach. In the second approach, the membrane rests on a viscoelastic carrier layer. During fabrication we use the thin nitride membrane to ensure uniformity of the elastic layer after which it is used as an etch stop for the bulk silicon etchant. This type of device is more robust, can use smaller pixel sizes, but has less sensitivity at low voltages. To achieve an optimal, but simple fabrication procedure, the membranes and electronics are fabricated in different processes, ensuring a higher optical quality of the membrane and increasing yield at lower costs. Applications lie in the field of projection displays, optical lithography, optical communication networks, etc.

Citation Download Citation

Serhat Sakarya, Gleb V. Vdovin, and Pasqualina M. Sarro "Technology for integrated spatial light modulators based on reflective membranes", Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); https://doi.org/10.1117/12.454711

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available