First realization and characterization of multilayer EUV reflective coatings

Piergiorgio Nicolosi; Alessandro Patelli; Maria-Guglielmina Pelizzo; Valentino Rigato; Gianluigi Maggioni; L. Depero; E. Bontempi; G. Mattei; Luca Poletto; Paolo Mazzoldi; Giuseppe Tondello

doi:10.1117/12.450947

20 December 2001 First realization and characterization of multilayer EUV reflective coatings

Piergiorgio Nicolosi, Alessandro Patelli, Maria-Guglielmina Pelizzo, Valentino Rigato, Gianluigi Maggioni, L. Depero, E. Bontempi, G. Mattei, Luca Poletto, Paolo Mazzoldi, Giuseppe Tondello

Author Affiliations +

Proceedings Volume 4506, Soft X-Ray and EUV Imaging Systems II; (2001) https://doi.org/10.1117/12.450947
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Experimental results on the realization of Mo/Si multilayer mirrors for EUV applications are presented. The multilayers have been deposited using RF-magnetron sputtering. The characterization of single layers and multilayers has been performed using different physical techniques. The reflectivity of multilayer mirrors optimised for 13 and 19 nm radiation has been measured and compared to simulation.

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Piergiorgio Nicolosi, Alessandro Patelli, Maria-Guglielmina Pelizzo, Valentino Rigato, Gianluigi Maggioni, L. Depero, E. Bontempi, G. Mattei, Luca Poletto, Paolo Mazzoldi, and Giuseppe Tondello "First realization and characterization of multilayer EUV reflective coatings", Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, (20 December 2001); https://doi.org/10.1117/12.450947

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