Reliability of micro-electro-mechanical systems (MEMS)

Srinivas Tadigadapa; Nader Najafi

doi:10.1117/12.443002

2 October 2001 Reliability of micro-electro-mechanical systems (MEMS)

Srinivas Tadigadapa, Nader Najafi

Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.443002
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Reliability is a key parameter for the eventual prevalence of microelectromechanical systems (MEMS) as either sub-components or as standalone products. Traditionally, micromachined components have been made by separating the micromachined chip design and fabrication processes from the packaging and reliability issues.

Citation Download Citation

Srinivas Tadigadapa and Nader Najafi "Reliability of micro-electro-mechanical systems (MEMS)", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); https://doi.org/10.1117/12.443002

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