Optical switch array based on microforming process

Yusuke Hashiura; Tsuyoshi Ikehara; Akiko Kitajima; Hiroshi Goto; Ryutaro Maeda

doi:10.1117/12.448996

21 November 2001 Optical switch array based on microforming process

Yusuke Hashiura, Tsuyoshi Ikehara, Akiko Kitajima, Hiroshi Goto, Ryutaro Maeda

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448996
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

With increasing data traffics, the importance of the switches is increasing and further cost reduction will be expected. One of the most effective efforts to decrease the cost is introduction of forming technology for micro parts fabrication. The materials of interest are polymer materials for their low cost. In this study, the prototype is presented of the optical switch based on microforming process of polymer materials, and basic characteristics of micro hot embossing are presented. In the present switch, the pop up type micro mirror array on the moving diaphragm fabricated by microforming is actuated by electrostatic force and the optimum electrodes structure of the switch is analyzed by computer simulation to fulfill the large deformation and stable switching. Total system fabrication process including optical fiber alignment and device packaging is also presented. Finally hot embossing of polymer materials are characterized experimentally.

Citation Download Citation

Yusuke Hashiura, Tsuyoshi Ikehara, Akiko Kitajima, Hiroshi Goto, and Ryutaro Maeda "Optical switch array based on microforming process", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448996

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