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In this paper, a fast process of fabrication of diffractive optical elements by excimer laser ablation of polymer films is mainly described. For fabrication of a two-level diffractive element, fewer steps and less time are needed.
Qihong Lou andLin Zhang
"Polymer and glass etching by ArF and XeCl excimer lasers", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444685
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Qihong Lou, Lin Zhang, "Polymer and glass etching by ArF and XeCl excimer lasers," Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444685