Calibrated displacement actuator for nanometer metrology

Alson E. Hatheway

doi:10.1117/12.437740

24 July 2002 Calibrated displacement actuator for nanometer metrology

Alson E. Hatheway

Author Affiliations +

Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.437740
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States

Abstract

The author has developed a new instrument mechanism that is sufficiently sensitive to operate in the nanometer and subnanometer dimensional regimes and has sufficient stability to maintain calibration for extended periods of time. The mechanism has been designed into a calibrated displacement actuator for use in calibrating surface metrology instruments. Tests at China Lake, California, and Gaithersburg, Maryland, suggest linearity better than 1:10,000, repeatability better than 1:10,000 and stability better than 6:10,000 per year. These results include contributions from all sources of metrology error and no attempt has been made to separate the contributors and isolate the actuator’s own contributions. The physics of the actuator suggests that its behavior may be even better than these measurements demonstrate. The actuator may be easily adapted to 2- and 3-axis motion control in instruments. It may provide very reliable resources for metrology in the nanometer and sub-nanometer regimes.

Citation Download Citation

Alson E. Hatheway "Calibrated displacement actuator for nanometer metrology", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); https://doi.org/10.1117/12.437740

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